Thin Film Deposition

 

Thin film deposition, E-gun and Multi Target Magnetron Sputtering.

  • AJA Orion Sputtering System, eight 2-inch targets, Ar, N2, O2

  • AJA II ATC 2200 Sputtering System, four 3-inch targets, Ar, N2, O2 

  • Thermionics UHV E-gun deposition, “Eurovac”, linear five-hearth gun

  • “Sputnik” alumina Rodfeed E-gun depostion system, with Ar-ion etching gun 

  • Edwards Auto 306 HV E-gun deposition, Thermal deposition

  • AGAR SEM Carbon coater 

  • Paroteq Flip-Chip Bonder