We emphasize direct-writing methods for patterning, especially E-beam and Focused-ion-beam lithography (EBL&FIB), but also direct-write photo-lithography, as opposed to mask-based lithography. This saves time and money with our small-series nano-device research and small-series prototyping.
Our specialty are films and multilayers by sputtering and evaporation. We work with a wide variety of materials, with cross-usage requirements that are not as stringent as in many specialized-process labs. Our proof-of-concept environment is ideally suited to academic research as well as various startups and spinoffs in the nano-tech area.
Our users have access to various etching systems capable of sample cryo-cooling; processes based on various resists, surface profilometers, optical microscopes, ovens, chip bonders, probe stations, and various other tools. Additionally, we offer a versatile lineup of AFM microscopes and an EDX system for chemical analysis.
Single Quantum, a spinoff from the Zwiller group (KTH-APhys), commercializes high-performance single-photon detectors based on superconducting nanostructures. The outstanding superconducting film deposition and nano-patterning processes available at KTH-ANL enable joint R&D of KTH and Single Quantum on developing a new generation of single-photon detectors with the time resolution, noise level, and detection efficiencies setting new standards in quantum optics . The application space is the booming quantum communications, where SQ is one of the fastest growing start-ups internationally.
 J. Zichi, J. Chang, S. Steinhauer, K. von Fieandt, J. W. N. Los, G. Visser, N. Kalhor, T. Lettner, A. W. Elshaari, I. E. Zadeh, and V. Zwiller, “Optimizing the stoichiometry of ultrathin NbTiN films for high-performance superconducting nanowire single-photon detectors”, Opt. Express 27, 26579-26587 (2019).
Figure main panel: top view of superconducting NbTiN meander-patterned single-photon detector; top-left: meander-nanowire close-up; bottom-right: detector integrated with optics.
KTH-ANL hosts the biggest and most versatile atomic force microscopy (AFM) lab in Sweden. Thanks to this rich and flexible environment, Intermodulation Products AB was founded as a spinoff of the Haviland group (KTH-APhys). Intermodulation Products AB commercializes add-on equipment to labs and users who want to extend the measurement capabilities of their AFM with mechanical, electrical and magnetic characterization, for applications ranging from energy materials to life sciences. All the special modes developed by Intermodulation Products are available to users of the KTH-ANL AFMs. The start-up is actively expanding its products space, e.g. to high-speed multi-frequency lock-in systems.
Comparison of Intermodulation EFM and KPFM by users of AFM-ANL. Maps and histograms of work function in volts measured on graphene monolayer (blue) with flakes of bilayer graphene (yellow). Graphene is thermally grown on silicon carbide (SiC) substrate. White scale bars are 3 μm. From R. Borgani, PhD Thesis, KTH 2018.